Interconnect Capacitance
Metal1 36 86 32 70 Metal2 11 77 14 42 Metal3 7 31 7 31 Metal4 NA NA 5 25
Substrate capacitance units in aF/um^2, Fringe is aF/um. There is capacitance between other layers as well (M1 to M2, M1 to M3, etc), but this is not shown.