MOSIS Submicron Rules
Metal 1 width (3 lambda), spacing 3 lambda
Metal 2 width (3 lambda), spacing 3 lambda
Metal 3 width (5 lambda), spacing 3 lambda
Via width (2 lambda) and metal2 overlap (1 lambda) is 4 lambda total
Via2 width (2 lambda) and metal3 overlap (2 lambda) is 6 lambda total
Lambda = 0.3 (HP14TB process, 0.5u nwell)
- M1Line-on-M1line = 1.8u (6 lambda)
- M2Line-on-M2Line = 1.8u (6 lambda)
- M3Line-on-M3Line = 2.4u (8 lambda)
- Via-on-Via = 2.1u (7 lambda)
- Via2-on-Via2 = 2.7u (9 lambda)
Lambda = 0.2 (HP10TB process, 0.35u nwell)
- MOSIS page (http://www.mosis.org)